This book integrates the overview of knowledge from nanofabrication, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering in one volume. It will analyse fundamental size-dependent phenomena in several fields of chemistry and physics, which form part of leading research efforts in nanotechnology. The products of advanced nanotechnology that will become available in coming decades promise even more revolutionary applications than the products of current and near-term nanotechnology and they are referred to in this volume. It is suitable for scholars in related fields who require an overview of the fundamental topics in nanotechnology. The main objective of this book is providing an introduction to nanotechnology, such that researchers in other areas too can appreciate this science at a new level and technical administrators can have a bird's eye view of this subject. This book on nanoscience and nanotechnology gathers information about the various tools, methods and systems to provide students, researchers and everyone else an open-source handbook and overview guide to this vast interdisciplinary and expanding field.